| D-semi | |
|
X/Y/Z repeated positioning accuracy X/Y/Z Repeat Position Accuracy |
Plus or minus 5 um @ 3 sigma (CPK of 1.33 or higher) |
|
Motion-driven mode Motion-Driven Mode |
Linear Motor(XY)+ Servo Motor(Z) Linear Motor(XY)+ Servo Motor(Z) |
|
XY maximum velocity XY Maximum Speed |
1200mm/s |
|
Dispensing range PCB Max/Min Size |
300*200mm |
| Minimum point diameter | 100±20um |
|
Machine dimensions Machine Dimensions |
1710*1400*1880mm |
X
